Alloy Service cannot start raspberrypi 4

Hello Everyone. I have issues installing the alloy service by following this manual: Grafana

I have run the terminal command to install the alloy service and it looks successful. But the service cannot start. I get the following error via journalctl:

Nov 13 15:35:56 raspberrypi systemd[1]: Started alloy.service - Vendor-agnostic OpenTelemetry Collector distribution with programmable pipelines.
Nov 13 15:35:56 raspberrypi (alloy)[2204]: alloy.service: Failed to execute /usr/bin/alloy: No such file or directory
Nov 13 15:35:56 raspberrypi (alloy)[2204]: alloy.service: Failed at step EXEC spawning /usr/bin/alloy: No such file or directory
Nov 13 15:35:56 raspberrypi systemd[1]: alloy.service: Main process exited, code=exited, status=203/EXEC

The file /usr/bin/alloy exists. If i try to run it directly from the terminal I get:

root@raspberrypi.local:/usr/bin# alloy
bash: /usr/bin/alloy: cannot execute: required file not found

Any ideas what to check? thanks a lot.